Changzhou Qicheng Environmental Technology has launched its Hybrid Scrubber equipment, employing composite material adsorption and cooling technology to efficiently treat potent greenhouse gases such as PFCs and NF3, thereby supporting the semiconductor industry in achieving green production.
Addressing the industry challenge of treating perfluorinated compounds (PFCs) in semiconductor manufacturing, Changzhou Qicheng Environmental Technology Co., Ltd. has recently launched its next-generation Hybrid Scrubber equipment. Utilising a dual-effect "adsorption + cooling" technology combined with proprietary specialised adsorbent materials, this device decomposes and adsorbs difficult-to-treat gases such as PFCs and NF₃, achieving industry-leading treatment efficiency.
The Hybrid Scrubber series comprises multiple models including the QC-200HB and QC-100HB, accommodating gas flow rates from 50 to 200 standard litres per minute (slm). Operating temperatures span 400°C to 650°C, while its modular design facilitates maintenance and upgrades. Constructed from corrosion-resistant materials, the equipment incorporates PLC automated control and safety interlock mechanisms, and is currently deployed across multiple domestic semiconductor facilities. The company's technical lead stated that this equipment fills a gap in domestic PFC treatment technology. Future plans include accelerating market expansion in Southeast Asia to support the global semiconductor industry's low-carbon transition.
